Synthesis and characterization of Ga2O3 nanosheets on 3C-SiC-on-Si by low pressure chemical vapor deposition
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منابع مشابه
Synthesis of Wide Bandgap β‐Ga2O3 Rods on 3C-SiC-on-Si
This paper presents the synthesis of single crystalline, selfcatalytic β-Ga2O3 rods by a low pressure chemical vapor deposition technique. The effects of oxygen concentration and growth temperature on the morphology and growth rate of β-Ga2O3 rods were studied. The β-Ga2O3 rods were synthesized on a 3C-SiC film deposited on a silicon substrate utilizing high purity gallium (Ga) metal and oxygen...
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